Hitachi
S 9300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi S-9300 is a CD-SEM (critical dimension scanning electron microscope) for semiconductor metrology. The S-9300 supports both 200mm and 300mm wafers through a conversion kit. The S-9300 achieves a resolution of 3nm at 800V using retarding/boosting mode.[1]
Power
6kVA Single Phase[3]
Gas delivery
Nitrogen, Oil free Air (OFA), PCW Glycol[1]
Optics
1000x to >300000x[1]
What it is
The Hitachi S 9300 is a scanning electron microscope used for metrology and inspection in semiconductor manufacturing.[2][3]
How it works
The Hitachi S 9300 uses a Schottky emission source, an electromagnetic lens system, and electromagnetic scan and deflection elements to form and steer the electron beam.[1]
Where it fits in the process flow
General reference — not yet source-verifiedThe Hitachi S 9300 fits in wafer inspection and metrology after pattern formation, where the tool evaluates printed structures on processed wafers.
Applications
What do the numbers mean?
Power & electrical5
Vacuum & pumping1
- Objective Lens
- 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum[1]
Wafer handling8
Gas & chemistry1
Optics & imaging4
Control & software6
Configuration & options21
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Thermo Fisher Scientific FEI Quanta 450 FEG— Same function class: Metrology & Inspection, nullCompare in depthsource[5]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power requirement6kVA Single Phase[3]
- Accelerating voltage500V to 1600V, 10V steps[1]
- Electromagnetic Lens3-Stage Electromagnetic Lens with boosting voltage[1]
- Objective Lens4 opening click stop, heated aperture is selectable/adjustable outside the vacuum[1]
- Field control methodContinuously on for sample decharging at all voltages[1]
- Resolution3nm (800V) Retarding/Boosting Mode[1]
- Chemicals UsedNitrogen, Oil free Air (OFA), PCW Glycol[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of data does this class of machine provide?General reference — not yet source-verified
Depending on the sensing method, it can provide images, dimensional measurements, surface-condition information, or defect-location data.
What kinds of samples are inspected?General reference — not yet source-verified
Such systems are used on semiconductor and other precision-manufactured parts with small features, fine patterns, or sensitive surface conditions.
Not publicly documented
The following facts about the S 9300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9300 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]fabsurplus.com — fabsurplus.comfabsurplus.com
- [2]Equipment inventory listing
- [3]ptwsingapore.com — ptwsingapore.comptwsingapore.com
- [4]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [5]Equipment inventory listing
Last updated Oct 11, 2026.
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