KLA
5200
The KLA 5200 is an overlay metrology system. The KLA 5200 uses Coherence Probe Microscopy (CPM), a patented white-light interferometric technique. The KLA 5200 can measure feature sizes down to .18 µm.[1]
What it is
General reference — not yet source-verifiedHow it works
The KLA 5200 uses Coherence Probe Microscopy, a patented white-light interferometric technique. The KLA 5200 uses that method to identify surfaces rather than only edges. The KLA 5200 includes built-in analysis software and a graphical user interface for production operation, in-line process qualification, and off-line engineering analysis.[1][3]
Where it fits in the process flow
The KLA 5200 helps chipmakers tighten process specifications, improve process control, and reduce time to market on advanced products with feature sizes down to .18 µm. The KLA 5200 can improve stepper utilization and support long-term control. The KLA 5200 provides data intended to prevent lithography process errors and manage the overlay budget as feature sizes shrink.[1][3]
Applications
The KLA 5200 is used for overlay metrology for advanced lithography. The KLA 5200 can measure all layers, including low-contrast or grainy targets.[1][3]
- Overlay metrology for advanced lithography
- In-line process qualification
- Off-line engineering analysis
What do the numbers mean?
Performance3
Control & software2
Configuration & options5
- Measurement technology
- Coherence Probe Microscopy (CPM), a patented white-light interferometric technique[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the KLA 5200?
The KLA 5200 is an overlay metrology system for advanced lithography.[1][3][4]
What measurement method does the KLA 5200 use?
The KLA 5200 uses Coherence Probe Microscopy, a patented white-light interferometric technique.[1][3]
Not publicly documented
The following facts about the 5200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]dealer listingwotol.com
- [3]5200 — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [4]5200 Overlay Measurement — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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