KLA
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The Surfscan 7700 dates from 1996. The system carries part number 313270. The system is configured for 208 V, 20 A, 2-phase, 60 Hz power.[3]
A particle defect inspection system detects small surface anomalies such as particles, residue, and other contamination-related defects that may interfere with semiconductor processing. The basic operating principle is to scan a surface with controlled optical illumination and look for changes in the returned signal caused by defects or foreign material. The instrument typically produces defect locations, defect maps, and inspection records that can be reviewed by engineers or linked to process analysis.[3]
The Surfscan 7700 is used in the inspection and metrology portion of the process flow to verify surface quality and identify contamination before later process steps. Particle inspection helps identify contamination sources and supports yield control by catching surface defects that can propagate into later process problems. The tool is typically placed after cleaning, deposition, or other front-end steps to confirm that the wafer surface is acceptable for subsequent processing.[3]
The 7700 is applied to particle and defect detection on wafers in semiconductor manufacturing. The system is suited to monitoring surface quality after cleaning and before critical process steps. The inspection output supports yield management by identifying contamination sources and by providing data for process analysis.[3]
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The KLA 7700 is a particle defect inspection system in the Surfscan family.[3]
The following facts about the 7700 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 7700 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 7700 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 7700 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 7700 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 7700 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 15, 2026.