KLA
Surfscan 7700 Particle Defect
What it is
The Surfscan 7700 is a model of particle defect system manufactured by KLA. The system carries part number 313270. The system is configured for 208 V, 20 A, 2-phase, 60 Hz power. The system dates from 1996.[1]
What do the numbers mean?
Power & electrical2
Configuration & options6
- 20 A[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does a particle defect inspection system detect?General reference — not yet source-verified
It detects small surface anomalies such as particles, residue, and other contamination-related defects that may interfere with semiconductor processing.
Where is this class of tool used in manufacturing?General reference — not yet source-verified
It is used in the inspection and metrology portion of the process flow to verify surface quality and identify contamination before later process steps.
What is the basic operating principle of this class?General reference — not yet source-verified
It scans a surface with controlled optical illumination and looks for changes in the returned signal caused by defects or foreign material.
Why is particle inspection important?General reference — not yet source-verified
Particle inspection helps identify contamination sources and supports yield control by catching surface defects that can propagate into later process problems.
What kind of output does this class produce?General reference — not yet source-verified
It typically produces defect locations, defect maps, and inspection records that can be reviewed by engineers or linked to process analysis.
Not publicly documented
The following facts about the Surfscan 7700 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 7700 Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 7700 Particle Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 7700 Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 7700 Particle Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 7700 Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
Last updated Sep 1, 2026.
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