Surfscan 7700 Particle Defect

The KLA Surfscan 7700 Particle Defect is a metrology and inspection system. The KLA Surfscan 7700 Particle Defect is a model in the KLA Surfscan family. The KLA Surfscan 7700 Particle Defect carries part number 313270. The KLA Surfscan 7700 Particle Defect is configured for 208 V, 20 A, 2-phase, 60 Hz power. The KLA Surfscan 7700 Particle Defect dates from 1996.^[2][1][6]

Particle defect inspection systems scan a wafer or other substrate surface with controlled optical illumination and monitor the returned signal for changes caused by particles, residue, or other surface anomalies. Particle defect inspection systems generally produce defect locations, maps, and inspection records for engineering review and process analysis.

Particle defect inspection systems are used in the inspection and metrology portion of semiconductor manufacturing. Particle defect inspection systems are applied between process steps to verify surface condition before later operations are performed. Particle defect inspection systems support contamination monitoring and surface quality checks that feed back into process control.

Particle defect inspection systems are used to detect surface contamination that can interfere with semiconductor processing. Particle defect inspection systems are applied where engineers need to find particles, residue, and related surface defects on patterned or unpatterned substrates. Particle defect inspection systems support yield management by identifying contamination issues before they propagate into later process problems.