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KLA

8100 Electronic Source

Thermal / DiffusionKLA 8100 family
Research Quality: 30% complete
8100 Electronic Source — Inventory photo
Fig. 018100 Electronic SourceInventory photo[1]

Power

3000 V[2]

Vacuum

3.20 E-10 Torr[2]

What is it?

The KLA 8100 Electronic Source is a KLA-manufactured equipment item with listed vacuum and beam-related specifications.

What do the numbers mean?

Power & electrical1

Extraction voltage
3000 V[2]
Accurate?

Vacuum & pumping1

Base pressure post bake
3.20 E-10 Torr[2]
Accurate?

Configuration & options4

Filament current
2330 mA[2]
Accurate?
Temperature at current
1800 Kelvin[2]
Accurate?
Extraction current
105 uA[2]
Accurate?
Refurbished[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Base pressure post bake3.20 E-10 Torr[2]
  • Extraction voltage3000 V[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 8100 Electronic Source are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 8100 Electronic Source are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 8100 Electronic Source are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 8100 Electronic Source are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 8100 Electronic Source are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 8100 Electronic Source is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
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Last updated Jul 29, 2026.

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