KLA
Candela 8620 Surface
The KLA Candela 8620 Surface is a surface inspection system. The KLA Candela 8620 Surface is a substrate and epitaxy wafer inspection system. The KLA Candela 8620 Surface was introduced in 2011.[1][2]
Produced
2011–
Power
50/60 Hz[1]
How it works
The KLA Candela 8620 uses a proprietary optical design and detection technology. The KLA Candela 8620 detects and classifies sub-micron defects that are not consistently identified by current inspection methods. The KLA Candela 8620 has an imaging and detection system optimized to enhance the signal from relevant defects of interest while suppressing background noise. The KLA Candela 8620 also uses multi-channel detection optics to support high purity defect classification.[2]
Where it fits in the process flow
The KLA Candela 8620 is intended for substrate and epitaxy wafer inspection in high brightness LED manufacturing. The KLA Candela 8620 supports quality control of both opaque and transparent substrates. The KLA Candela 8620 is designed to improve process control for MOCVD reactor operations.[2]
Applications
The KLA Candela 8620 can detect substrate defects such as micro-scratches and micro-cracks. The KLA Candela 8620 can detect defect sources from lithography and etch processes for patterned sapphire, including missing bumps and resist voids. The KLA Candela 8620 can detect macro- and micro-defects in MOCVD processes, including hexagonal pits, bumps, and epi cracks.[2]
What do the numbers mean?
Vintage & configurations
- 2011Production start[2]
The Candela 8620 inspection system was introduced in January 2011.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What manufacturing area is the Candela 8620 aimed at?
The KLA Candela 8620 is designed for high brightness LED manufacturing.[2]
What materials can the Candela 8620 inspect?
The KLA Candela 8620 provides automated defect inspection for LED materials such as gallium nitride, sapphire, and silicon carbide.[2]
What types of defects does the Candela 8620 target?
The KLA Candela 8620 can detect substrate defects such as micro-scratches and micro-cracks. The KLA Candela 8620 can detect patterned sapphire defect sources including missing bumps and resist voids. The KLA Candela 8620 can detect MOCVD-related macro- and micro-defects including hexagonal pits, bumps, and epi cracks.[2]
Not publicly documented
The following facts about the Candela 8620 Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Candela 8620 Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela 8620 Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela 8620 Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela 8620 Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the Candela 8620 Surface are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]ir.kla.com — ir.kla.comir.kla.com
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]wotol.comwotol.com
Last updated Oct 17, 2026.
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