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KLA

Surfscan SP 2 Particle Defect

Metrology & Inspection300mmKLA Surfscan family
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The KLA Surfscan SP 2 is a particle defect inspection system. The KLA Surfscan SP 2 provides <37 nm defect sensitivity on polished bare silicon. The KLA Surfscan SP 2 supports wafer sizes of 6, 8, and 12 inches.[1][2]

Surfscan SP 2 Particle Defect — Inventory photo
Fig. 01Surfscan SP 2 Particle DefectInventory photo[1]

Wafer size

300mm

Vacuum

Vacuum 300mm/200mm[10]

Performance

Optimized Sensitivity & Throughput[1]

Optics

UV Laser[1]

What it is

General reference — not yet source-verified

Particle defect inspection systems scan wafer surfaces for light-scattering events associated with particles and other surface defects. Particle defect inspection systems are used to detect contamination, map defect locations, and support yield-related monitoring in semiconductor manufacturing.

How it works

General reference — not yet source-verified

Particle scanners of this class direct controlled illumination onto the wafer surface and detect scattered light from localized surface anomalies. Particle scanners of this class convert the detected signal into defect maps and classification data for later review and process analysis.

Where it fits in the process flow

General reference — not yet source-verified

Surface particle inspection tools are used at monitoring points where contamination on bare or processed wafers can affect downstream yield and device performance. Surface particle inspection tools are commonly placed around substrate qualification, process qualification, and recurring line monitoring steps.

Applications

General reference — not yet source-verified

Particle defect inspection systems are applied where fabs need to separate particulate contamination from broader surface-condition signatures and to trend defectivity over time. Particle defect inspection systems can support engineering work on substrate cleanliness, process excursions, and recurring contamination sources.

What do the numbers mean?

Vacuum & pumping4

Handler Type
Vacuum 300mm/200mm[10]
Accurate?
Wafer handler
300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP) Ballroom Configuration; Phoenix 2.0 Handler[1]
Accurate?
Wafer size
Includes 300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP)[1]
Accurate?
Handler
300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP) Ballroom Configuration (Standard)[1]
Accurate?

Wafer handling7

Enables qualification of current & next generation substrates, SOI, strained SOI, and strained Si[1]
Accurate?
Phoenix 2.0 Handler[2]
Accurate?
Yaskawa Robot[2]
Accurate?
Wafer Sizes
12 inch[1]
Accurate?
Wafer Sizes
6, 8 inch[2]
Accurate?
Wafer size
300mm[10]
Accurate?
Wafer sizes supported
6, 8, and 12 inches[10]
Accurate?

Optics & imaging14

&lt;37 nm defect sensitivity on polished bare silicon[1]
Accurate?
Qualification & monitoring of process tools, at the 90, 65, & 45 nm technology nodes[1]
Accurate?
UV Laser[1]
Accurate?
Advanced Illumination Optics Supporting the Following Mode(s):[1]
Accurate?
Oblique Illumination[1]
Accurate?
Defect sensitivity
<37 nm on polished bare silicon[1]
Accurate?
Technology nodes
90, 65, & 45 nm[1]
Accurate?
Illumination
Oblique Illumination; DF (Oblique, Normal) ST and LT Mode[2]
Accurate?
Included licenses
Optical Filter, Enhanced XY Coordinates, 2 mm Edge Exclusion, Standard Classification Package, LPD-N Classification, LPD-ES Classification, Grading & Sorting, Haze, Haze Analysis & Normalization, Haze Line Classification, IDM 2011 Vintage[1]
Accurate?
Illumination
DF (Oblique, Normal) ST and LT Mode[2]
Accurate?
Particle sensitivity
<37 nm defect sensitivity on polished bare silicon[1]
Accurate?
Illumination mode
Oblique illumination[1]
Accurate?
Included components
UV Laser; defect map & histogram with zoom; iMicroView measurement capability; SURFimage; Real-Time Defect Classification (RTDC); Microsoft Windows XP Operating System[1]
Accurate?
Optics
UV Laser[10]
Accurate?

Performance4

Optimized Sensitivity & Throughput[1]
Accurate?
Standard Throughput Inspection Mode[1]
Accurate?
Inspection modes
Standard Throughput Inspection Mode, High Sensitivity Inspection Mode[1]
Accurate?
Performance
Optimized Sensitivity & Throughput[1]
Accurate?

Control & software6

Microsoft Windows XP Operating System[1]
Accurate?
Configured for IC/OEM Mfg Surf Quality Recipe[1]
Accurate?
Software version
5.40[2]
Accurate?
Operating system
Microsoft Windows XP[1]
Accurate?
Software vs
5.40[2]
Accurate?
Control system
Microsoft Windows XP Operating System[1]
Accurate?

Configuration & options17

P/N
0074965-000[1]
Accurate?
Includes HDD[1]
Accurate?
Assists in process trouble shooting & development[1]
Accurate?
Includes the Following Components:[1]
Accurate?
Defect map& histogram with zoom[1]
Accurate?
iMicroView measurement capability[1]
Accurate?
SURFimage[1]
Accurate?
Real-Time Defect Classification (RTDC)[1]
Accurate?
Features Following Inspection Modes:[1]
Accurate?
High Sensitivity Inspection Mode[1]
Accurate?
1 Shinko Load Port / 1 Rorze Port[2]
Accurate?
Collection
Wide & Narrow[2]
Accurate?
OEM
KLA[1]
Accurate?
Model
Surfscan SP 2[1]
Accurate?
Category
Metrology & Inspection[10]
Accurate?
Defect classification
Real-Time Defect Classification (RTDC)[1]
Accurate?
Load ports
1 Shinko Load Port / 1 Rorze Port[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Handler TypeVacuum 300mm/200mm[10]
  • Wafer handler300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP) Ballroom Configuration; Phoenix 2.0 Handler[1]
  • Wafer sizeIncludes 300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP)[1]
  • Handler300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP) Ballroom Configuration (Standard)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the KLA Surfscan SP 2 support?

The KLA Surfscan SP 2 supports 6-, 8-, and 12-inch wafer sizes.[1][2]

What is the defect sensitivity of the Surfscan SP 2?

The system achieves a defect sensitivity of less than 37 nanometers on polished bare silicon.[1]

What illumination modes are available on the SP 2?

The Surfscan SP 2 offers oblique and normal dark-field illumination modes.[1][2]

What inspection modes does the SP 2 have?

The system includes standard throughput inspection mode and high sensitivity inspection mode.[1]

Does the Surfscan SP 2 include real-time defect classification?

Yes, the Surfscan SP 2 includes Real-Time Defect Classification (RTDC) capability.[1]

Not publicly documented

The following facts about the Surfscan SP 2 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 2 Particle Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 2 Particle Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Surfscan SP 2 Particle Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Surfscan SP 2 Particle Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Surfscan SP 2 Particle Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (11)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]Inventory photo
  9. [9]Inventory photo
  10. [10]waferpedia.comwaferpedia.com
  11. [11]Equipment inventory listing
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Last updated Oct 20, 2026.

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