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KLA

Surfscan SP 2 Particle Defect

Metrology & InspectionKLA Surfscan family
Research Quality: 20% complete
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Surfscan SP 2 Particle Defect — Inventory photo
Fig. 01Surfscan SP 2 Particle DefectInventory photo[1]

Vacuum

Vacuum 300mm/200mm[2]

Performance

Optimized Sensitivity & Throughput[1]

Optics

UV Laser[1]

What is it?

What do the numbers mean?

Vacuum & pumping1

Handler Type
Vacuum 300mm/200mm[2]
Accurate?

Wafer handling3

Enables qualification of current & next generation substrates, SOI, strained SOI, and strained Si[1]
Accurate?
Phoenix 2.0 Handler[2]
Accurate?
Yaskawa Robot[2]
Accurate?

Optics & imaging5

<37 nm defect sensitivity on polished bare silicon[1]
Accurate?
Qualification & monitoring of process tools, at the 90, 65, & 45 nm technology nodes[1]
Accurate?
UV Laser[1]
Accurate?
Advanced Illumination Optics Supporting the Following Mode(s):[1]
Accurate?
Oblique Illumination[1]
Accurate?

Performance2

Optimized Sensitivity & Throughput[1]
Accurate?
Standard Throughput Inspection Mode[1]
Accurate?

Control & software2

Microsoft Windows XP Operating System[1]
Accurate?
Configured for IC/OEM Mfg Surf Quality Recipe[1]
Accurate?

Configuration & options11

P/N
0074965-000[1]
Accurate?
Includes HDD[1]
Accurate?
Assists in process trouble shooting & development[1]
Accurate?
Includes the Following Components:[1]
Accurate?
Defect map& histogram with zoom[1]
Accurate?
iMicroView measurement capability[1]
Accurate?
SURFimage[1]
Accurate?
Real-Time Defect Classification (RTDC)[1]
Accurate?
Features Following Inspection Modes:[1]
Accurate?
High Sensitivity Inspection Mode[1]
Accurate?
1 Shinko Load Port / 1 Rorze Port[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Handler TypeVacuum 300mm/200mm[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Surfscan SP 2 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 2 Particle Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 2 Particle Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Surfscan SP 2 Particle Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Surfscan SP 2 Particle Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Surfscan SP 2 Particle Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (10)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]Inventory photo
  9. [9]Inventory photo
  10. [10]Equipment inventory listing
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Last updated Jul 29, 2026.

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