Lam Research

2300 Exelan Flex 45 Dielectric

Etch Lam Research 2300 family

Research Quality: 30% complete

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2300 Exelan Flex 45 Dielectric — Inventory photo — Fig. 012300 Exelan Flex 45 DielectricInventory photo^[1]

Power

27MHz RF generator not working^[1]

Gas delivery

With 12 gas lines^[1]

What is it?

Lam 2300 Exelan Flex 45 Dielectric Etcher is a single-chamber etching system with a homemade manual load lock and 12 gas lines.

Why won't it start?

Documented failure modes, common issues, and field considerations.

27 MHz RF generator not working
Water flow error when using the other 2 RF generators

What do the numbers mean?

Power & electrical2

27MHz RF generator not working^[1]

Accurate?

Can etch with other 2 RF generators, but get water flow error^[1]

Accurate?

Wafer handling2

Sustains the activities on nano-patterning transfer capability and specially block co-polymers, graphene, and shaped nanostructures etching^[1]

Accurate?

Single chamber with homemade manual load lock^[1]

Accurate?

Gas & chemistry1

With 12 gas lines^[1]

Accurate?

Configuration & options1

C4F8, CF4, O2, Ar, CO, CO2, O2, CHF3, HBr, N2, SF6, H2^[1]

Accurate?

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationWith 12 gas lines^[1]
Configuration27MHz RF generator not working^[1]
ConfigurationCan etch with other 2 RF generators, but get water flow error^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 2300 Exelan Flex 45 Dielectric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 Exelan Flex 45 Dielectric are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 Exelan Flex 45 Dielectric are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 Exelan Flex 45 Dielectric are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 2300 Exelan Flex 45 Dielectric is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2300 Exelan Flex 45 Dielectric are on record.
Answerable by: an OEM parts catalog or a service engineer