Lam Research
2300 Versys Kiyo Polysilicon
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The 2300 Versys Kiyo Polysilicon Etch can be configured with up to four Kiyo MCX process chambers. The system includes a transfer chamber, an atmospheric robot with a single end effector, a vacuum transfer module robot with dual end effectors, and a dual wafer-slot airlock vacuum system with nitrogen purge.[3]
Where it fits in the process flow
General reference — not yet source-verifiedPolysilicon etching is a critical step in the fabrication of complementary metal-oxide-semiconductor (CMOS) devices, particularly for defining gate electrodes. The process typically follows polysilicon deposition and photolithography, and precedes subsequent doping or dielectric deposition steps. In memory devices, polysilicon etching is used in wordline and bitline formation.
Applications
General reference — not yet source-verifiedThe system is also capable of processing other film types such as amorphous silicon and silicon-germanium, depending on chamber configuration and process chemistry.
What do the numbers mean?
Wafer handling2
- Configuration (Kiyo 2300 V2)
- 4 Kiyo CX chambers, 3 load ports, ATM robot with one end effector, VTM robot with dual end effectors, software version SP15-HF6, communication protocols RS232 and LON[3]
Configuration & options1
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 2300 V2 | — | — | 3 load ports, 4 Kiyo CX chambers, ATM and VTM robots, software SP15-HF6 | media-moov-co.s3.us-west-1.amazonaws.com[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2300 Versys Kiyo Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 Versys Kiyo Polysilicon are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 2300 Versys Kiyo Polysilicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 Versys Kiyo Polysilicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 Versys Kiyo Polysilicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2300 Versys Kiyo Polysilicon are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
- [3]media-moov-co.s3.us-west-1.amazonaws.com — media-moov-co.s3.us-west-1.amazonaws.commedia-moov-co.s3.us-west-1.amazonaws.com
Last updated Aug 27, 2026.