Lam Research
9600
Plate 01#Brooks robot Lam research 9400 9600 etcher VTM robot overhaul exchange repair
wafer robot repair overhaul Brooks Kawasaki rorzeWatch on YouTube
Power
208 V[1]
Vacuum
Adixen Alacatel ATH 1300 Turbo Pump[1]
Gas delivery
Gas Box Configured for 6 Gasses[1]
What is it?
What do the numbers mean?
Power & electrical2
- RPG 1250 RF Generators[1]
Vacuum & pumping1
- Adixen Alacatel ATH 1300 Turbo Pump[1]
Wafer handling4
Gas & chemistry2
Control & software1
- Envision Software[1]
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 9600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9600 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 9600 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
Last updated Jul 29, 2026.