Applied Materials

Centura 5200 MXP+

Etch Applied Materials Centura 5200 family

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Centura 5200 MXP+ — Inventory photo — Fig. 01Centura 5200 MXP+Inventory photo^[1]

Vacuum

IQDP80 (x4) / IQDP80/WSU151 (x2)^[1]

Gas delivery

32 Digital MFCs (14-Unit or 18-Horiba)^[1]

What is it?

What do the numbers mean?

Vacuum & pumping1

Dry Pumps: IQDP80 (x4) / IQDP80/WSU151 (x2)^[1]

Wafer handling1

HP Robot^[1]

Accurate?

Gas & chemistry2

Gases Used: NF3, CH3F, CL2, HBr, CHF3, Ar, CF4, O2, N2, C4F8, CO^[1]
Mass Flow Controllers (MFCs): 32 Digital MFCs (14-Unit or 18-Horiba)^[1]

Control & software1

Software Version: 4.9_15^[1]

Configuration & options8

Components:^[1]; Orienter (x1)^[1]; MxP Poly (x1)^[1]; MxP+ Poly (x2)^[1]; eMxP+ (x1)^[1]
ESC Type: Polymide^[1]
Endpoint: Monochromator^[1]
Chillers: Neslab 150 units (x5)^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Centura 5200 MxP Chamber	—	—	Described as an MxP Etching Chamber with 200 mm version.	fabsurplus.com^[5]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Gases UsedNF3, CH3F, CL2, HBr, CHF3, Ar, CF4, O2, N2, C4F8, CO^[1]
Mass Flow Controllers (MFCs)32 Digital MFCs (14-Unit or 18-Horiba)^[1]
Dry PumpsIQDP80 (x4) / IQDP80/WSU151 (x2)^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Centura 5200 MXP+ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 MXP+ are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Centura 5200 MXP+ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura 5200 MXP+ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura 5200 MXP+ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Centura 5200 MXP+ are on record.
Answerable by: an OEM parts catalog or a service engineer