Applied Materials
Centura 5200 MXP+
Power
208 VAC, 3 Phase, 240 A, 50/60 Hz[5]
Vacuum
IQDP80 (x4) / IQDP80/WSU151 (x2)[6]
Gas delivery
32 Digital MFCs (14-Unit or 18-Horiba)[1]
What it is
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical6
Vacuum & pumping6
Wafer handling4
- HP Robot[1]
Gas & chemistry9
Control & software3
Configuration & options30
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Centura 5200 MxP Chamber | — | — | Described as an MxP Etching Chamber with 200 mm version. | fabsurplus.com[9] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Nordson March AP 300— Same function class: Etch, nullCompare in depthsource[10]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Gases UsedNF3, CH3F, CL2, HBr, CHF3, Ar, CF4, O2, N2, C4F8, CO[1]
- Mass Flow Controllers (MFCs)32 Digital MFCs (14-Unit or 18-Horiba)[1]
- Dry PumpsIQDP80 (x4) / IQDP80/WSU151 (x2)[6]
- Gas Panel TypeStandard[5]
- Voltage208 VAC, 3 Phase, 240 A, 50/60 Hz[5]
- Loadlock pumpEbara[5]
- Pump SizeA 10[5]
- HF RF Gen TypeENI OEM 12B-3[5]
- Etch RF Match TypePhase 4[8]
- LF RF Gen TypeNone[5]
- HF RF generator typeENI OEM 12B-3[8]
- LF RF generator typeNone[8]
- Vacuum pumpsIQDP80 (x4) / IQDP80/WSU151 (x2)[1]
- Gas delivery32 Digital MFCs (14-Unit or 18-Horiba)[8]
- Gas setNF3, CH3F, CL2, HBr, CHF3, Ar, CF4, O2, N2, C4F8, CO[1]
- Gas setNF3, CH3F, CL2, HBR, CHF3, AR, CF4, O2, N2, C4F8, CO, HE/O2[6]
- Gas setCO, N2, C4F8, O2, CF4, CHF3, AR[7]
- Mass flow controllers32 Digital MFCs 14-Unit or 18-Horiba[6]
- Mass flow controllers28 Digital MFCs 25-Unit or 3-Horiba[7]
- Dry pumps4-IQDP80, 2-IQDP80/WSU151[6]
- Dry pumps1-DS80, 3-DS700[7]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the typical number of process chambers on a Centura platform?General reference — not yet source-verified
Centura cluster tools generally support multiple process chambers arranged around a central transfer module, though the exact number can vary by configuration and generation.
Is this platform suitable for conductor etch applications?General reference — not yet source-verified
The Centura 5200 MXP+ is specifically designed for dielectric etch. Conductor etch applications typically use different chemistries and hardware configurations on other platforms.
Not publicly documented
The following facts about the Centura 5200 MXP+ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 MXP+ are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Centura 5200 MXP+ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura 5200 MXP+ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura 5200 MXP+ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Centura 5200 MXP+ are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (11)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]macquarie.com — macquarie.commacquarie.com
- [7]macquarie.com — macquarie.commacquarie.com
- [8]waferpedia.com — waferpedia.comwaferpedia.com
- [9]fabsurplus.com — fabsurplus.comfabsurplus.com
- [10]waferpedia.comwaferpedia.com
- [11]Applied Materials Centura 5200 MxP+ Dielectric Dielectric Etch for sale — fabsurplus.comfabsurplus.com
Last updated Oct 11, 2026.
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