Lam Research

Concept Two Sequel

Deposition Lam Research Concept Two family

Research Quality: 30% complete

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Concept Two Sequel — Inventory photo — Fig. 01Concept Two SequelInventory photo^[1]

What is it?

The Lam / Novellus Concept Two Sequel is a PECVD (plasma-enhanced chemical vapor deposition) system for 8-inch wafers.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Pressure gauge missing / faulty parts
Ebara AA 40 W-H (2)
Ebara 150 WT (2)
GS4 Burnbox
Missing transfer module pump, loadlock pump, process chamber pump, and abatement system

What do the numbers mean?

Vacuum & pumping2

Pressure Gauge^[1]

Accurate?

Missing Transfer Module Pump, Loadlock Pump, Process Chamber Pump, & Abatement System^[1]

Accurate?

Wafer handling3

Mag 7 Transfer Module Robot^[1]
Loadlock Slit Valve Actuator: SMC^[1]
Loadlock Indexer Controller: Animatics CC Model CDP 2407 2^[1]

Control & software4

Software Version: 4.92 B 15^[1]
Factory Interface: SMIF (2)^[1]
Input & Output Controller: IOC O, IOC2, IOC3^[1]
TV Controller: Millipore^[1]

Configuration & options11

Thin Film^[1]
CIM: SECS^[1]
Process: SRO MIM^[1]
QNX OS Version: 4.23 A^[1]
Chamber Type: A (C2-CV0D-S) / B (C2-CVDD-S)^[1]
SMIF: LPI 2200^[1]; Cool Station (4)^[1]; Missing / Faulty Parts:^[1]; Ebara AA 40 W-H (2)^[1]; Ebara 150 WT (2)^[1]; GS4 Burnbox^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationPressure Gauge^[1]
ConfigurationMissing Transfer Module Pump, Loadlock Pump, Process Chamber Pump, & Abatement System^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Concept Two Sequel are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Concept Two Sequel are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Concept Two Sequel are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Concept Two Sequel are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Concept Two Sequel is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Concept Two Sequel are on record.
Answerable by: an OEM parts catalog or a service engineer