Waferpedia

Tool family

Lam Research Concept Two

Models in this family

  1. The Lam / Novellus Concept Two Sequel is a PECVD (plasma-enhanced chemical vapor deposition) system for 8-inch wafers.

  2. Lam / Novellus Concept Two Sequel Express is a deposition chamber described as an installed chamber with room for a second chamber.

  3. Lam / Novellus Concept Two Speed NExT is a CVD (Chemical Vapor Deposition) system for 8-inch wafers.

  4. The Lam / Novellus Concept Two Speed S (A) is a chamber-only etch tool.

All entries

  1. Concept TwoLam Research
    CategoryDeposition
    9 specs
  2. Concept Two Dual SequelLam Research
    CategoryDeposition
    24 specs
  3. Concept Two SequelLam Research

    The Lam / Novellus Concept Two Sequel is a PECVD (plasma-enhanced chemical vapor deposition) system for 8-inch wafers.

    CategoryDeposition
    20 specs
  4. Concept Two Sequel ExpressLam Research

    Lam / Novellus Concept Two Sequel Express is a deposition chamber described as an installed chamber with room for a second chamber.

    CategoryDeposition
    5 specs
  5. Concept Two SpeedLam Research
    2 specs
  6. Concept Two Speed NExTLam Research

    Lam / Novellus Concept Two Speed NExT is a CVD (Chemical Vapor Deposition) system for 8-inch wafers.

    CategoryDeposition
    20 specs
  7. Concept Two Speed S (A)Lam Research

    The Lam / Novellus Concept Two Speed S (A) is a chamber-only etch tool.

    CategoryEtch
    8 specs