Tool family
The Lam / Novellus Concept Two Sequel is a PECVD (plasma-enhanced chemical vapor deposition) system for 8-inch wafers.
Lam / Novellus Concept Two Sequel Express is a deposition chamber described as an installed chamber with room for a second chamber.
Lam / Novellus Concept Two Speed NExT is a CVD (Chemical Vapor Deposition) system for 8-inch wafers.
The Lam / Novellus Concept Two Speed S (A) is a chamber-only etch tool.
The Lam / Novellus Concept Two Sequel is a PECVD (plasma-enhanced chemical vapor deposition) system for 8-inch wafers.
Lam / Novellus Concept Two Sequel Express is a deposition chamber described as an installed chamber with room for a second chamber.
Lam / Novellus Concept Two Speed NExT is a CVD (Chemical Vapor Deposition) system for 8-inch wafers.
The Lam / Novellus Concept Two Speed S (A) is a chamber-only etch tool.