Mellen
SC12.5R
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Mellen SC12.5R is a three-zone tube furnace. The Mellen SC12.5R has a 24-inch hot zone divided into three 8-inch heating zones. The Mellen SC12.5R reaches a maximum temperature of 1200 °C per zone.[1][2]
What it is
The Mellen SC12.5R is a three-zone tube furnace used for thermal processing of materials.[1][3]
Two Mellen SC12.5R furnaces are installed at the Quantum Structures Facility (QSF) within the California NanoSystems Institute at UC Santa Barbara, each capable of independent operation.[3][1]
Each furnace has a total hot-zone length of 24 inches, divided into three heating zones of 8 inches each, with a maximum operating temperature of 1200 °C per zone.[1]
How it works
The Mellen SC12.5R uses three independently controlled heating zones, each equipped with a thermocouple that provides real-time temperature feedback to the MELLEN ADAPT control system.[1]
The MELLEN ADAPT control system is a centralized computer that can program complex, multiday temperature treatments and monitor up to twelve temperature zones independently.[1]
Sintered alumina plugs and fiberglass wool are available to limit heat loss from the tube ends, and stainless steel flanges with o-ring seals allow the introduction of inert or reducing gases such as argon, nitrogen, oxygen, and dilute hydrogen during heat treatment.[1]
Where it fits in the process flow
General reference — not yet source-verifiedTube furnaces of this class are used in semiconductor and materials research for thermal processes such as annealing, oxidation, diffusion, and deposition.
Applications
General reference — not yet source-verifiedTypical applications include thermal annealing, oxidation, diffusion doping, and controlled-atmosphere heat treatment of materials.
What do the numbers mean?
Control & software1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How many heating zones does the Mellen SC12.5R have?
What is the hot-zone length of the Mellen SC12.5R?
The Mellen SC12.5R has a total hot-zone length of 24 inches.[1][2]
What is the maximum temperature of each zone?
Each zone of the Mellen SC12.5R can reach a maximum temperature of 1200 °C.[1][2]
Not publicly documented
The following facts about the SC12.5R are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SC12.5R are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SC12.5R are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SC12.5R are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SC12.5R are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SC12.5R is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]cnsi.ucsb.edu — cnsi.ucsb.educnsi.ucsb.edu
- [2]SC12.5R — Mellen | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]cnsi.ucsb.edu — cnsi.ucsb.educnsi.ucsb.edu
Last updated Oct 12, 2026.
Compare with similar tools
View all →The Blue M 0 500 is an oven manufactured by Blue M, with asset number 139866.
The Varian 0332 F 9453 302 Diffusion is a diffusion pump.