OAI

800

Research Quality: 40% complete

800 — nanofab.utah.edu — Fig. 01800nanofab.utah.edu^[1]

What is it?

The sources identify the OAI 800 as an aligner in the lithography section and as an OAI 800 tool used in the cleanroom equipment list. A training/service form also includes OAI 800 among selectable equipment.

What can it run?

Process applications and technology nodes documented for this tool.

Lithography alignment

What do the numbers mean?

Configuration & options4

Tool type: Aligner^[2]
Equipment section: Lithography^[2]
Tool name: OAI 800^[1]
Serial number: 1398^[1]

Interested in this tool?

Embed spec card

What replaced it?

siblingOAI 200— Listed alongside OAI 800 in the aligners section.source^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the OAI 800?

It is a backside aligner.^[1]

Is the OAI 800 included in the equipment training and service request list?

Yes. It appears among the selectable tools on the equipment training or service request form.^[3]

Not publicly documented

The following facts about the 800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
[2]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
[3]Request Equipment Training or Service | Utah Nanofab — nanofab.utah.edunanofab.utah.edu