Onto Innovation
AXI 935 Macro Defect
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedThe Onto Innovation AXI 935 Macro Defect is a metrology and inspection tool for semiconductor manufacturing.
How it works
General reference — not yet source-verifiedA macro defect inspection tool examines wafer surfaces for visible irregularities, contamination, and other large-scale defect conditions before those wafers move to later process steps.
Metrology and inspection systems in this class typically combine optical measurement and automated image review to locate defects and support process control.
Where it fits in the process flow
General reference — not yet source-verifiedThe AXI 935 Macro Defect sits in the inspection flow used to screen wafers before downstream processing proceeds.
Applications
General reference — not yet source-verifiedThe AXI 935 Macro Defect is used for semiconductor wafer defect inspection and metrology.
What do the numbers mean?
Wafer handling2
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
How is this class different from dimensional metrology?General reference — not yet source-verified
Dimensional metrology measures intended feature geometry, while macro defect inspection looks for unwanted events such as particles, scratches, residue, missing material, stains, and pattern anomalies.
What kind of output does this class of tool provide?General reference — not yet source-verified
Such systems generally produce defect maps, event classifications, image data, and summary results that engineers use to monitor trends, isolate excursions, and decide whether additional review is needed.
Not publicly documented
The following facts about the AXI 935 Macro Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AXI 935 Macro Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AXI 935 Macro Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AXI 935 Macro Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AXI 935 Macro Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AXI 935 Macro Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Equipment inventory listing
- [3]waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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