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It is used to measure patterned or surfacedefined features and to inspect for defects, variation, or other departures from the intended result.
It provides measurement and inspection data such as feature geometry, surface condition, uniformity, and defect-related information.
No. It is generally a monitoring and analysis tool that sits alongside process steps and supports control of those steps.
It can help reveal changes in pattern transfer, surface quality, alignment, uniformity, and other signs that a process is drifting from target behavior.
It helps confirm that intermediate and finished surfaces meet expected criteria and provides feedback that supports yield and process stability.
The following facts about the MP 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the MP 300 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MP 300 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MP 300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MP 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MP 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Last updated Jul 29, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA 0035235-003 MMD Head is a TSTD PCB ASSY, MMD MEAS HEAD compatible with the KLA AIT-XP.