Onto Innovation
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Onto Innovation NSX 105 is a macro defect inspection system. The NSX 105 is designed for 300 mm wafers. The NSX 105 is also known under the Rudolph and August brands.[1][2]
Macro defect inspection tools typically use brightfield or darkfield illumination with a camera or scanning system to capture images of the entire wafer surface.
The captured images are analyzed by algorithms to identify defects that are visible to the naked eye or larger than a few microns.
Macro defect inspection systems are used after critical process steps such as chemical mechanical planarization (CMP), photolithography, or etch, as well as for incoming wafer inspection and final quality control.
Macro defect inspection is applied in semiconductor manufacturing for monitoring contamination, handling damage, and process-induced defects.
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The following facts about the NSX 105 Macro Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the NSX 105 Macro Defect are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 105 Macro Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSX 105 Macro Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSX 105 Macro Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 105 Macro Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Last updated Aug 20, 2026.
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