Onto Innovation

The Onto Innovation NSX 115 AOI is an automated optical inspection machine used in metrology and inspection.
Automated optical inspection systems use optical imaging and comparison methods to find surface defects, pattern errors, and other visible process variations on manufactured parts or substrates.
An AOI machine typically moves a target under cameras and illumination, captures images, and evaluates the images against expected features or acceptance criteria.
Automated optical inspection is used in the inspection flow to verify process quality after a manufacturing step and before later process stages build on the inspected material.
A system of this class is generally placed where visual defect detection, dimensional screening, or pattern verification is needed during production and quality control.
Automated optical inspection is used for defect detection, pattern inspection, and general quality screening in semiconductor manufacturing and related precision fabrication workflows.
A machine of this class is used on material surfaces and patterned substrates where optical access supports inspection of visible features.
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The NSX 115 AOI unit is specified with full load of 6 A and largest load of 1.5 A.[1]
The following facts about the NSX 115 AOI are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 115 AOI are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSX 115 AOI are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSX 115 AOI are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 115 AOI are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 115 AOI is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 13, 2026.
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