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NSX 115 AOI

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NSX 115 AOI — Inventory photo
Fig. 01NSX 115 AOIInventory photo[1]

Power

200-240 VAC, 50/60 Hz[1]

Optics

Automated Optical Inspection (AOI)[1]

What it is

General reference — not yet source-verified

The Onto Innovation NSX 115 AOI is an automated optical inspection machine used in metrology and inspection.

How it works

General reference — not yet source-verified

Automated optical inspection systems use optical imaging and comparison methods to find surface defects, pattern errors, and other visible process variations on manufactured parts or substrates.

An AOI machine typically moves a target under cameras and illumination, captures images, and evaluates the images against expected features or acceptance criteria.

Where it fits in the process flow

General reference — not yet source-verified

Automated optical inspection is used in the inspection flow to verify process quality after a manufacturing step and before later process stages build on the inspected material.

A system of this class is generally placed where visual defect detection, dimensional screening, or pattern verification is needed during production and quality control.

Applications

General reference — not yet source-verified

Automated optical inspection is used for defect detection, pattern inspection, and general quality screening in semiconductor manufacturing and related precision fabrication workflows.

A machine of this class is used on material surfaces and patterned substrates where optical access supports inspection of visible features.

What do the numbers mean?

Power & electrical4

Power
200-240 VAC, 50/60 Hz[1]
Accurate?
Single Phase[1]
Accurate?
Power supply
200-240 VAC, 50/60 Hz[1]
Accurate?
Phase
Single phase[1]
Accurate?

Optics & imaging1

Type
Automated Optical Inspection (AOI)[1]
Accurate?

Configuration & options5

Full Load
6 A[1]
Accurate?
Largest Load
1.5 A[1]
Accurate?
Parts Machine[4]
Accurate?
Vintage (listed unit)
2010[1]
Accurate?
Listed unit designation
Parts machine[4]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power200-240 VAC, 50/60 Hz[1]
  • ConfigurationSingle Phase[1]
  • Power supply200-240 VAC, 50/60 Hz[1]
  • PhaseSingle phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the model name?

The model name is NSX 115.[1][4]

What type of machine is the NSX 115?

The NSX 115 is an automated optical inspection machine.[1][4]

What electrical load information is given for the NSX 115 AOI unit?

The NSX 115 AOI unit is specified with full load of 6 A and largest load of 1.5 A.[1]

Not publicly documented

The following facts about the NSX 115 AOI are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 115 AOI are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSX 115 AOI are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSX 115 AOI are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSX 115 AOI are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSX 115 AOI is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]inventory listing
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Last updated Oct 13, 2026.

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