Oxford Instruments

Plasmalab 80 uP RIE

Etch Oxford Instruments Plasmalab 80 family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Plasmalab 80 uP RIE — Inventory photo — Fig. 01Plasmalab 80 uP RIEInventory photo^[1]

What is it?

Oxford Instruments Plasmalab 80 uP RIE is a reactive ion etcher that was mainly used for O2 plasma processing and includes a vacuum pump.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Slit valve sometimes does not fully open when venting back to atmosphere after a run

What do the numbers mean?

Vacuum & pumping1

Includes vacuum pump^[1]

Accurate?

Configuration & options2

Was mainly used for O2 plasma processing^[1]

Accurate?

Slit valve sometimes doesn't fully open when venting back to atmosphere after a run^[1]

Accurate?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationIncludes vacuum pump^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the Plasmalab 80 uP?

It is a reactive ion etcher.^[1]

What process is it mainly used for?

It was mainly used for O2 plasma processing.^[1]

Not publicly documented

The following facts about the Plasmalab 80 uP RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Plasmalab 80 uP RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Plasmalab 80 uP RIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Plasmalab 80 uP RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Plasmalab 80 uP RIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Plasmalab 80 uP RIE are on record.
Answerable by: an OEM parts catalog or a service engineer