Oxford Instruments
PlasmaPro 100 Cobra
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Plate 01PlasmaPro 100 Estrelas DRIE – Oxford Instruments Plasma Technology
Oxford InstrumentsWatch on YouTube
What it is
What do the numbers mean?
Control & software1
- With HDD and Software[1]
Configuration & options2
Where are the manuals?
Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.
- CNS Consolidated RatesDocumentharvard.edu
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the PlasmaPro 100 Cobra are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PlasmaPro 100 Cobra are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PlasmaPro 100 Cobra are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PlasmaPro 100 Cobra are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PlasmaPro 100 Cobra are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PlasmaPro 100 Cobra is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]epfl.chepfl.ch
- [3]Etching ‒ Center of MicroNanoTechnology CMi ‐ EPFL — epfl.chepfl.ch
- [4]Oxford ICP Etcher (PlasmaPro 100 Cobra) - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [5]ETCH-17: Oxford ICP Etcher - ALE | Equipment | Maryland NanoCenter FabLab — nanocenter.umd.edunanocenter.umd.edu
- [6]Equipment Capabilities - Electrical & Computer Engineering — ece.utoronto.caece.utoronto.ca
- [7]Tool Details - Harvard CNS — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
- [8]Utah-Nanofab-tool-list-July-2025-1 — nanofab.utah.edunanofab.utah.edu
Last updated Jul 29, 2026.