Waferpedia

Brewer Science

B2

100mmDUVBrewer Science B2 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Brewer ScienceB2
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Wafer size

100mm

Node / era

DUV

What is it?

The source lists Brewer Science B2 as DUV42P and identifies it as a developable bottom antireflective coating used on the TEL Clean Track ACT-8 process track. The ACT-8 is described as an industry-standard wafer coater and developer configured for 100 mm wafers and used for DUV lithography.

What can it run?

Process applications and technology nodes documented for this tool.

  • DUV lithography
  • Bottom antireflective coating (BARC) use on the ACT-8 process track

What do the numbers mean?

Wafer handling1

Configured wafer size on ACT-8
100 mm (4") wafers[1]
Accurate?

Configuration & options2

Type
Developable BARC[1]
Accurate?
Name in ACT-8 process list
B2 DUV42P[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the B2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the B2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the B2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the B2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the B2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • No publicly documented compatible parts, consumables, or accessories for the B2 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.chepfl.ch
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Last updated Jul 29, 2026.

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