Plasma-Therm
SLR 770 ICP Deep Silicon
Plate 01Plasmatherm SLR-770 DRIE Bosch Process
ClassOneVideosWatch on YouTubePlate 02Plasma-Therm SLR770 ICP Etcher Demonstration - System Overview - Part 1
Gregory WrightWatch on YouTubePlate 03Plasma-Therm SLR770 ICP Etcher Demonstration - Part 1
Gregory WrightWatch on YouTubePlate 04Plasma-Therm SLR770 ICP Etcher Demonstration - Part 2
Gregory WrightWatch on YouTubePlate 05Plasma-Therm SLR770 ICP Etcher Demonstration - Part 3
Gregory WrightWatch on YouTube
What is it?
What do the numbers mean?
Power & electrical4
Vacuum & pumping1
- Turbo Pump & Controller:[1]
Wafer handling1
- Load lock shuttle lock transfer[1]
Gas & chemistry2
- Gas Box:[1]
Control & software3
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationGas Box:[1]
- Process GasO2, Ar, SF6, C4F6[1]
- ConfigurationController & RF Generator:[1]
- ConfigurationRF Power Products RFPP I22050001 & I20050007 Adaptive Pressure Controller[1]
- ConfigurationRF Generator:[1]
- ConfigurationRF Power Products RFPP RF5S & AM-5[1]
- ConfigurationTurbo Pump & Controller:[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SLR 770 ICP Deep Silicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SLR 770 ICP Deep Silicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SLR 770 ICP Deep Silicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SLR 770 ICP Deep Silicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SLR 770 ICP Deep Silicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SLR 770 ICP Deep Silicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.