Plasma-Therm
Versaline VCX 600 ICP
The Plasma-Therm Versaline VCX 600 is an inductively coupled plasma (ICP) etching system. The Versaline VCX 600 is configured for 6-inch wafer processing. The Versaline VCX 600 includes an ENI MKS GMW25 source generator, chillers, transformer, and pumps.[1][2]
What it is
General reference — not yet source-verifiedAn ICP etch system is a plasma processing tool used to remove selected material from a wafer surface. An ICP etch system belongs to the pattern transfer part of microfabrication, where plasma chemistry and ion bombardment are combined to shape features defined by a mask.
How it works
The Plasma-Therm Versaline VCX 600 ICP is an inductively coupled plasma etching system.[1][2][3]
Where it fits in the process flow
General reference — not yet source-verifiedA plasma etch tool sits after a masking or lithography step and before later cleaning and downstream integration steps. A plasma etch tool transfers the masked pattern into underlying films by removing material where the wafer is exposed.
Applications
What do the numbers mean?
Power & electrical4
- 50/60 Hz[1]
Vacuum & pumping3
- with Chillers, Transformer, Pumps[1]
Wafer handling1
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration50/60 Hz[1]
- Source GeneratorENI MKS GMW25[1]
- Configurationwith Chillers, Transformer, Pumps[1]
- Electrical Input1 Phase, 3 Wire, 50/60 Hz, 208/230 Vac, 15 A[3]
- Included EquipmentChillers, Transformer, Pumps[1]
- Electrical Configuration1 Phase - 3 Wire - 50/60 Hz - 208/230 Vac - 15 A[1]
- Included ComponentsChillers, Transformer, Pumps[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Versaline VCX 600 ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Versaline VCX 600 ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Versaline VCX 600 ICP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Versaline VCX 600 ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Versaline VCX 600 ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Versaline VCX 600 ICP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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