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A probe station is a test platform used to make temporary electrical contact to structures on a wafer or device sample. Probe stations are used to position probes on contact pads so instruments can stimulate and measure the device under test without permanent packaging. Probe stations are part of electrical characterization and device evaluation work in semiconductor development, monitoring, and failure analysis.

A probe station brings fine probes into controlled contact with conductive pads on a wafer or other sample. A probe station typically combines a sample stage, optical viewing, precision motion, and electrical connections so an operator can align the probes and perform measurements. Source measure instrumentation is commonly used with probe stations to force voltage or current and read the electrical response from the contacted structure.

Probe stations are used after device structures and contact pads have been fabricated and before permanent assembly or package level test. Probe-station work commonly follows wafer fabrication steps and supports electrical checkout, process monitoring, and engineering analysis. Probe-station measurements can guide later decisions on dicing, packaging, qualification, or further investigation.

Probe stations are used for wafer-level electrical measurements on semiconductor devices, test structures, and process control patterns. Probe stations support activities such as current-voltage checks, contact verification, parametric characterization, and troubleshooting of device behavior. Probe stations are also used in research and development settings where temporary contact and visual alignment are needed for direct access to features on a sample.