SPTS
RIE-10
Wafer size
6-inch wafers
Power
up to 3,000 W[1]
Performance
6–10 µm/min[1]
Gas delivery
>50:1[1]
Optics
Claritas End Point Detector[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Si etch only
- High aspect ratio etch
- Deep etch
- Broad feature sizes from nano- to mm-scale in lateral dimension
- Micro pillars
- Nano pillars
- Micro trenches
- Nano trenches
- Via etch
- Through wafer via etch
- Wafer thinning
What do the numbers mean?
Power & electrical2
Wafer handling3
Gas & chemistry1
Optics & imaging1
Performance1
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the RIE-10 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RIE-10 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RIE-10 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RIE-10 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RIE-10 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RIE-10 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]cns1.rc.fas.harvard.edu — cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
Last updated Jul 29, 2026.
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