SUSS MicroTec
MA 150
What it is
General reference — not yet source-verifiedThe SUSS MicroTec MA 150 is a mask aligner used in lithography for pattern transfer on wafers. It belongs to the family of photolithography equipment used in semiconductor and related microfabrication workflows.
How it works
General reference — not yet source-verifiedA mask aligner holds a wafer and a patterned photomask in a controlled optical path, then uses alignment and illumination to transfer the mask pattern into a light-sensitive resist layer. The machine class is built around precise positioning, optical imaging, and exposure control so a wafer feature pattern can be repeated on the substrate surface.
Applications
General reference — not yet source-verifiedMask aligners are used for microfabrication on light-sensitive substrates and are common in laboratory, pilot-production, and production environments where contact or proximity exposure of photoresist is appropriate.
What do the numbers mean?
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the MA 150?
It is a mask aligner for photolithography.[2]
Not publicly documented
The following facts about the MA 150 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the MA 150 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA 150 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA 150 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MA 150 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the MA 150 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]web.archive.org — suss.com (Feb 27, 2012)web.archive.org
- [3]Inventory photo
Last updated Jul 29, 2026.
