SUSS MicroTec

MA 200 Automatic Mask

Lithography Capable of working with wafer masks up to 9″ x 9″SUSS MicroTec MA 200 family

Research Quality: 30% complete

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MA 200 Automatic Mask — Inventory photo — Fig. 01MA 200 Automatic MaskInventory photo^[1]

Plate 01Suss MA200 Compact Mask Aligner (2015 vintage) - Demonstration
Lithography Equipment SupportWatch on YouTube
Plate 02Suss MA200 Mask Aligner Refurbishment Process
ClassOneVideosWatch on YouTube

Wafer size

Capable of working with wafer masks up to 9″ x 9″

Power

1000 watt lamp house^[1]

Performance

Configured for top side alignment^[1]

Optics

UV 400 Optic (for 365nm & 405nm)^[1]

What is it?

The SUSS MA 200 Automatic Mask Aligner is a lithography tool configured for top-side alignment and described as capable of working with wafer masks up to 9″ x 9″.

What do the numbers mean?

Power & electrical2

1000 watt lamp house^[1]

Accurate?

Lamp power supply unit CIC 1000 LH 1000^[1]

Accurate?

Wafer handling2

Wafer size: Capable of working with wafer masks up to 9″ x 9″^[1]; Ergonomic Cassette plateforms^[1]

Optics & imaging4

UV 400 Optic (for 365nm & 405nm)^[1]

Accurate?

DVM8 microscope with motorized objective movement with field expanders^[1]

Accurate?

Objective 20x Olympus UMPL FL 20 X – working distance 12mm^[1]

Accurate?

Large clear field proximity mask holder for 9″ corner marks, with 8″ exposure area^[1]

Accurate?

Performance2

Configured for top side alignment^[1]

Accurate?

AL 3000 Auto alignment system^[1]

Accurate?

Configuration & options3

Lamp adapter LH1000/HBO MA8/MA200^[1]

Accurate?

Suss 2 Channel light sensor 365/405nm^[1]

Accurate?

XRS pre aligner^[1]

Accurate?

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration1000 watt lamp house^[1]
ConfigurationLamp power supply unit CIC 1000 LH 1000^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of alignment does this machine support?

It is configured for top-side alignment.^[1]

What lamp power is specified for the machine?

The listed lamp house is a 1000 watt lamp house.^[1]

Not publicly documented

The following facts about the MA 200 Automatic Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 200 Automatic Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA 200 Automatic Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA 200 Automatic Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA 200 Automatic Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA 200 Automatic Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report