SUSS MicroTec MA 200

Models in this family

1. 

   MA 200

   The SUSS MA 200 is a lithography aligner with source-listed wafer sizes of 6 inch and 8 inch.

2. 

   MA 200 Automatic Mask

   The SUSS MA 200 Automatic Mask Aligner is a lithography tool configured for top-side alignment and described as capable of working with wafer masks up to 9″ x 9″.

3. 

   MA 200 CC

   The SUSS MA 200 CC is an aligner.

4. 

   MA 200 CC Exposure
5. 

   MA 200 CC Mask

   The SUSS MA 200 CC is a mask aligner.

6. 

   MA 200 Compact Mask

   The SUSS MA 200 Compact Mask Aligner is a 6-inch wafer-handling mask aligner with robot handler type, two loaders, pre-aligner, GEM/SECS, CDA, vacuum, gas, and 400V power listed.

7. 

   MA 200 Gen 3 Mask

   The SUSS MA 200 Gen 3 is a mask aligner for lithography applications, with source-stated wafer sizes of 6 inch and 8 inch and an OEM-stated maximum wafer size of up to 8"/200 mm.

8. 

   MA 200 Mask