SUSS MicroTec
MA 200 CC
What it is
General reference — not yet source-verifiedIn a lithography line, a mask aligner is a contact or proximity exposure tool used to transfer a pattern from a photomask to a substrate. It is used for aligned exposure work rather than for deposition, etch, or metrology.
How it works
General reference — not yet source-verifiedA mask aligner operates by bringing a patterned mask into precise alignment with a coated substrate and then exposing the resist to actinic light. The alignment stage and chuck system position the substrate, while the optical exposure path projects or couples the mask pattern onto the resist area.
Where it fits in the process flow
General reference — not yet source-verifiedThis class of equipment sits in the photolithography segment of semiconductor processing, after substrate preparation and resist coating and before development and the downstream pattern-transfer steps that follow exposure.
Applications
General reference — not yet source-verifiedMask aligners are used for patterned lithography on substrates in semiconductor and microfabrication work, including processes that require registered exposure of photoresist through a mask.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Damaged or shortage: CIC controller, WEC chuck, Chuck Z axis
What do the numbers mean?
Wafer handling2
Control & software1
- CIC controller[1]
Configuration & options1
- Damaged or Shortage:[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the MA 200 CC?
It is a mask aligner used for lithography.[2]
Not publicly documented
The following facts about the MA 200 CC are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 200 CC are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA 200 CC are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA 200 CC are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the MA 200 CC is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MA 200 CC are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Remanufactured Equipment: SUSS MicroTec — suss.com (Feb 27, 2012)web.archive.org
Last updated Jul 29, 2026.
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