Waferpedia

SUSS MicroTec

PM 8

Test & ProbeSUSS MicroTec PM 8 family
Research Quality: 20% complete
PM 8 — Inventory photo
Fig. 01PM 8Inventory photo[1]

Power

Mitutoyo Light Power Supply[1]

Vacuum

6”/150mm Vacuum Chuck[1]

Optics

Trinocular (allows addition of CCD camera)[1]

What is it?

What do the numbers mean?

Power & electrical2

Mitutoyo Light Power Supply[1]
Accurate?
Suss PM8 Power Supply[1]
Accurate?

Vacuum & pumping3

6”/150mm Vacuum Chuck[1]
Accurate?
Platen allows for either Magnetic or Vacuum Positioners[1]
Accurate?
6 vacuum connections on each side (for probe heads)[1]
Accurate?

Wafer handling2

Manual X, Y, Z Adjustment of Chuck[1]
Accurate?
Manual Theta Adjustment of Chuck[1]
Accurate?

Optics & imaging3

Trinocular (allows addition of CCD camera)[1]
Accurate?
Mitutoyo 5x, 10x, 20x, and 50x M Plan Apo Objectives[1]
Accurate?
Fiber Optic Lightguide[1]
Accurate?

Configuration & options5

4 Suss PH150 Manipulators with Probe Arms[1]
Accurate?
Mitutoyo FS-60 Microscope[1]
Accurate?
Mitutoyo 10X WF Eyepieces (Qty 2)[1]
Accurate?
Vibration Isolation Table
TMC Micro-g 63-531[1]
Accurate?
User Manual for Suss PM8[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration6”/150mm Vacuum Chuck[1]
  • ConfigurationPlaten allows for either Magnetic or Vacuum Positioners[1]
  • Configuration6 vacuum connections on each side (for probe heads)[1]
  • ConfigurationMitutoyo Light Power Supply[1]
  • ConfigurationSuss PM8 Power Supply[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the PM 8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM 8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PM 8 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PM 8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the PM 8 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the PM 8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →