Teradyne
ETS 600
Plate 01Manipulator ETS-600/Test Head Handler
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What it is
The ETS 600 belongs to the Teradyne ETS family of test and probe equipment.[2]
How it works
A typical configuration of the ETS 600 includes an APU-12 board with 192 channels, an HPU board with 4 channels, an SPU-112 board with 24 channels, a DPU-16 board with 128 channels, a QMS board with 4 channels, a CBIT-64 board with 128 channels, a QTMU board with 8 channels, a DAAU board with 4 channels, an MCU-66MHz board with 16 channels, an ISOCOM 64 board with 128 channels, an SPU-112 BOOSTER board with 24 channels, an HCMUX board with 8 channels, and an MCU-CDB board with 16 channels.[1][2]
Where it fits in the process flow
General reference — not yet source-verifiedThe ETS 600 is used in the test stage of semiconductor manufacturing, after wafer fabrication and dicing, to verify that individual devices meet electrical specifications.
What do the numbers mean?
Power & electrical3
Configuration & options40
- Boards:[1]
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Advantest 93000 C 200 E— Same function class: Test & Probe, nullCompare in depthsource[3]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Does the ETS 600 work with a prober or a handler?General reference — not yet source-verified
Test systems of this class are normally integrated with a wafer prober for testing die on a wafer and with a package handler for testing finished packaged parts. The type of interfacing equipment depends on the test stage and the device form factor.
What kinds of devices can be tested?General reference — not yet source-verified
The device coverage of any system depends on its installed instrumentation and test software. As a class, these systems are used for integrated circuits and discrete semiconductor devices, including analog, mixed-signal, power, and logic products.
What happens when a device fails testing?General reference — not yet source-verified
The test program typically records the failure, stops further testing on that device if appropriate, and sends a signal to the handler or prober so the failing device can be separated. Failure data is stored for later analysis and yield tracking.
Is this type of equipment used only in production?General reference — not yet source-verified
No. Besides production screening, test systems of this class are used in engineering for characterization, design verification, process development, and failure analysis.
Not publicly documented
The following facts about the ETS 600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ETS 600 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ETS 600 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ETS 600 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ETS 600 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ETS 600 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Equipment inventory listing
Last updated Oct 13, 2026.
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