Tokyo Electron
A 85 Z Diffusion Anneal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Tokyo Electron A 85 Z Diffusion Anneal is a diffusion furnace for 6-inch wafers. The A 85 Z can reach process temperatures up to 1050°C.[1]
What it is
How it works
General reference — not yet source-verifiedDiffusion furnaces heat wafers in a controlled atmosphere to drive dopants into the silicon lattice or to activate implanted dopants during annealing.
Thermal processing of this class uses a horizontal or vertical quartz tube with a heated zone, precise temperature control, and a gas delivery system for process ambients.
Where it fits in the process flow
General reference — not yet source-verifiedIn a semiconductor fabrication flow, diffusion and annealing steps occur after ion implantation or predisposition to activate dopants and repair crystal damage, and they are followed by subsequent oxidation or deposition steps.
Applications
General reference — not yet source-verifiedTypical applications include dopant diffusion, thermal annealing, and other high-temperature furnace treatments in semiconductor device fabrication.
What do the numbers mean?
Wafer handling1
Configuration & options3
- Temp up to 1050*C[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of equipment is the Tokyo Electron A 85 Z?
It is a diffusion anneal machine.[1]
Not publicly documented
The following facts about the A 85 Z Diffusion Anneal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the A 85 Z Diffusion Anneal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the A 85 Z Diffusion Anneal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the A 85 Z Diffusion Anneal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the A 85 Z Diffusion Anneal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the A 85 Z Diffusion Anneal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]inventory listing
Last updated Aug 23, 2026.