Waferpedia

Tokyo Electron

WDF DP Frame

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What it is

General reference — not yet source-verified

A wafer prober is a semiconductor test tool that brings probe contacts into alignment with pads or bumps on a wafer so electrical measurements can be made before singulation. A prober typically works together with external test instrumentation while providing controlled wafer handling, positioning, and contact at the probe interface.

How it works

General reference — not yet source-verified

A wafer prober loads and positions a wafer on a chuck, moves the wafer relative to a probe card or probe head, and establishes contact so dies or test structures can be measured. A frame-style prober generally serves as the mechanical and motion platform for alignment, touchdown, and stepping across wafer locations during electrical test.

Where it fits in the process flow

General reference — not yet source-verified

Wafer probing sits in the electrical test flow after wafer fabrication has produced structures that can be contacted and before wafer singulation and final packaging. Probe operations are used to screen devices, characterize process results, and collect die-level electrical data while the devices are still on the wafer.

Applications

General reference — not yet source-verified

Wafer probers are used for die sort, parametric measurement, process monitoring, failure analysis support, and engineering characterization. Wafer probers can be applied to product wafers and to dedicated test structures when electrical contact to on-wafer features is required.

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[2]
Accurate?

Configuration & options4

OEM
Tokyo Electron[1]
Accurate?
Model
WDF DP Frame[2]
Accurate?
Equipment type
Frame Prober[2]
Accurate?
Category
Test & Probe[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the WDF DP Frame are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WDF DP Frame are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the WDF DP Frame are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the WDF DP Frame are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the WDF DP Frame are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the WDF DP Frame is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
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Last updated Oct 16, 2026.

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