Ultratech
Titan 4700
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Ultratech Titan 4700 is a stepper used in semiconductor lithography. The Titan 4700 uses G and H line optics and a 1000W lamp. The Titan 4700 supports wafer sizes from 4 to 8 inches.[1][2][3]
What it is
The Ultratech Titan 4700 is a stepper used in photolithography, a class of semiconductor equipment that projects a reticle image onto a photoresist-coated wafer to define circuit patterns. The Titan 4700 supports wafer sizes of 4 inch, 5 inch, 6 inch, and 8 inch. The tool is equipped with G-line and H-line optics.[2][3][1]
What do the numbers mean?
Wafer handling2
Gas & chemistry1
Optics & imaging5
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Extended Focus OptionYes (for thick resist exposure)[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Titan 4700 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Titan 4700 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Titan 4700 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Titan 4700 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Titan 4700 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Titan 4700 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]classoneequipment.com — classoneequipment.comclassoneequipment.com
- [3]classoneequipment.com — classoneequipment.comclassoneequipment.com
Last updated Sep 24, 2026.
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