Waferpedia

Ulvac

NE 950 EX ICP

EtchWafer end effectorUlvac NE 950 family
Research Quality: 30% complete
NE 950 EX ICP — Inventory photo
Fig. 01NE 950 EX ICPInventory photo[1]

What is it?

The Ulvac NE 950 EX ICP is an inductively coupled plasma etcher.

What do the numbers mean?

Wafer handling7

Cassette Load[1]
Accurate?
Cassette aligner[1]
Accurate?
Carrier Load / Aligner[1]
Accurate?
Atmospheric Robot ith dual end effectors[1]
Accurate?
Carrier End effector[1]
Accurate?
Wafer size
Wafer end effector[1]
Accurate?
Transfer chamber[1]
Accurate?

Control & software2

Toshiba FA2-100SS computer[1]
Accurate?
Computer Screen[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NE 950 EX ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NE 950 EX ICP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NE 950 EX ICP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NE 950 EX ICP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NE 950 EX ICP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NE 950 EX ICP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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