Waferpedia

YES

G500

Wet Processing / CleanYES G500 family
Research Quality: 30% complete
YESG500
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What is it?

The provided sources identify the YES-G500 as a plasma cleaning system within the etching systems section of the NanoLab equipment list. A separate source lists YES-G500 among the company's plasma cleaning system products and notes it has 2 powered shelves.

What can it run?

Process applications and technology nodes documented for this tool.

  • Plasma cleaning

What do the numbers mean?

Configuration & options4

Model
YES-G500[1]
Accurate?
Category
Plasma Cleaning System[1]
Accurate?
Product line description
Plasma Cleaning Systems[2]
Accurate?
Shelves
2 powered shelves[2]
Accurate?
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What replaced it?

  • siblingYES G1000Listed in the same plasma cleaning systems product line.source[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the G500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G500 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the G500 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the G500 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the G500 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the G500 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edunanolab.berkeley.edu
  2. [2]web.archive.orgweb.archive.orgweb.archive.org
  3. [3]Etching Systemsnanolab.berkeley.edunanolab.berkeley.edu
  4. [4]Capabilitiesnanolab.berkeley.edunanolab.berkeley.edu
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Last updated Jul 29, 2026.

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