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YES

HMDS1

Thermal / DiffusionYES HMDS1 family
Research Quality: 30% complete
HMDS1 — nanofab.utah.edu
Fig. 01HMDS1nanofab.utah.edu[1]

What is it?

The source identifies YES HMDS1 as an oven and places it in the lithography section, with the name shown as YES HMDS1 Oven. A separate equipment page and the tool-specific page both reference the same model, and one page lists the serial number as 87297.

What do the numbers mean?

Configuration & options6

Model
YES HMDS1[1]
Accurate?
Equipment type
Oven[2]
Accurate?
Section
Lithography[2]
Accurate?
Name as listed on equipment page
YES HMDS1 Oven[2]
Accurate?
Serial number
87297[1]
Accurate?
Tool owner
Brian Baker[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the HMDS1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HMDS1 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HMDS1 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HMDS1 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HMDS1 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HMDS1 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edunanofab.utah.edu
  2. [2]nanofab.utah.edunanofab.utah.edunanofab.utah.edu
  3. [3]Request Equipment Training or Service | Utah Nanofabnanofab.utah.edunanofab.utah.edu
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Last updated Jul 29, 2026.

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