YES
PB12-2P-CP
The YES PB12-2P-CP is a high-temperature vacuum bake/cure oven built for BCB/polyimide processes. The YES PB12-2P-CP accommodates 2 cassettes of 12-inch wafers in a single-compartment chamber. The YES PB12-2P-CP includes a CTC controller with a color touchscreen and a cooling package.[1][2]
Wafer size
12 in.
Power
208 V, 3 phase, 30 A, 50/60 Hz[3]
Vacuum
high-temperature vacuum bake/cure oven[4]
What it is
The YES PB12-2P-CP is a high-temperature vacuum bake and cure oven for BCB and polyimide processing. The YES PB12-2P-CP accommodates 2 cassettes of 12-inch wafers in a single-compartment chamber. The YES PB12-2P-CP has a chamber size of 14.5 inches by 21 inches by 27 inches deep. The YES PB12-2P-CP includes a CTC controller with a color touchscreen and a cooling package. The YES PB12-2P-CP operates at temperatures up to 450 °C.[1][4][2]
How it works
The YES PB12-2P-CP uses preheated nitrogen during operation. The nitrogen passes in laminar flow from the roof of the chamber down over the wafer cassettes and out through the chamber base. The YES PB12-2P-CP removes particles by exhausting them during each evacuation cycle. The controller supports 8 separate recipes with up to 16 ramps and dwells in each recipe.[1][4]
Where it fits in the process flow
General reference — not yet source-verifiedThermal bake and cure ovens generally sit after liquid film coating steps and before later patterning or integration steps. Such tools are used when a deposited film must be stabilized by heat treatment before the wafer moves on to subsequent fabrication operations.
Applications
The YES PB12-2P-CP is designed for polyimide bake, BCB bake, spin-on glass processing, and flat panel applications.[1][4]
- polyimide bake
- BCB bake
- flat panel
What do the numbers mean?
Power & electrical1
Vacuum & pumping1
Wafer handling3
Control & software3
Dimensions & facilities3
Configuration & options11
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES PB12-2P-CP | — | — | — | web.archive.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of tool is the YES PB12-2P-CP?
The YES PB12-2P-CP is a high-temperature vacuum bake and cure oven for BCB and polyimide processing.[1][4][2]
How many wafers can the YES PB12-2P-CP hold?
The YES PB12-2P-CP accommodates 2 cassettes of 12-inch wafers in a single-compartment chamber.[1][4][2]
What controller does the YES PB12-2P-CP use?
The YES PB12-2P-CP uses a CTC controller with a color touchscreen.[1][4]
Not publicly documented
The following facts about the PB12-2P-CP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PB12-2P-CP are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PB12-2P-CP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PB12-2P-CP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PB12-2P-CP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PB12-2P-CP are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]YES PB12-2P-CP family | Waferpedia — waferpedia.comwaferpedia.com
- [3]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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