Zygo
Nexview NX 2 Optical Surface
The Zygo Nexview NX 2 Optical Surface is a non-contact surface profiler. The Zygo Nexview NX 2 Optical Surface supports objectives from 1.0X to 100X magnification. The Zygo Nexview NX 2 Optical Surface uses a proprietary solid-state white light source.[1][2]
Plate 01Overview of ZYGO Nexview™ NX2 Non-Contact Optical Profiling System
Zygo CorporationWatch on YouTubePlate 02ZYGO Nexview™ NX2 Non-Contact Optical Profiling System - 3D Optical Profiler
Tam NguyenWatch on YouTube
What it is
General reference — not yet source-verifiedOptical surface profilers are metrology tools for measuring surface height and texture without touching the part. Optical surface profilers are used to characterize topography, step height, roughness, waviness, and related surface features on patterned and unpatterned samples. Optical surface profilers sit in inspection and metrology flows rather than in patterning, deposition, or etch itself.
How it works
General reference — not yet source-verifiedOptical profilometers form a surface map by collecting reflected light from the sample over an area rather than tracing the surface with a stylus. Interferometric profilers recover height information from the optical signal while scanning focus or optical path through the surface. Non-contact measurement avoids probe wear and avoids mechanically disturbing delicate or soft surfaces. Area measurement makes these tools useful for surfaces whose important features are distributed across a field instead of lying along a single trace.
Where it fits in the process flow
General reference — not yet source-verifiedOptical surface metrology tools are used after process steps that create, modify, or polish topography on a wafer or component. Optical surface metrology tools commonly check outcomes from lithography, etch, deposition, planarization, cleaning, and finishing workflows. Optical surface metrology tools feed measurement results back to process development, qualification, and control loops.
Applications
General reference — not yet source-verifiedOptical surface profilers are used where three-dimensional height information is needed from reflective, patterned, polished, rough, or film-covered surfaces. Optical surface profilers are common in process development, failure analysis, quality control, and incoming or outgoing dimensional verification. Optical surface profilers are also used on precision optics, microfabricated structures, and engineered surfaces where contact methods are undesirable.
What do the numbers mean?
Power & electrical3
Vacuum & pumping3
Optics & imaging23
- Objective Mounting Options:[2]
- Single objective dovetail[2]
- Optical Zoom Motorized 3-position encoded zoom[2]
- Field of View Objective and zoom selectable from 0.04 x 0.04mm to 17.49 x 17.49mm,[2]
- Illuminator Proprietary solid-state white light source with software-selectable field stop, aperture stop and spectral filters[2]
- Focus Motorized manual or auto focus with through-the-lens focus aid[2]
- Objective Mounting Options
- Single objective dovetail; Manual Encoded 4-position turret; Motorized 4-position turret[2]
- Optical Zoom
- Motorized 3-position encoded zoom - 0.5X, 1.0X, 2.0X included; 0.75X, 1.5X optional[2]
- Field of View
- 0.04 x 0.04 mm to 17.49 x 17.49 mm, selectable by objective and zoom; integrated field stitching[2]
- Illuminator
- Proprietary solid-state white light source with software-selectable field stop, aperture stop and spectral filters[2]
Performance1
Control & software2
Configuration & options21
- Manual Encoded 4-position turret[2]
- Motorized 4-position turret[2]
- 0.5X, 1.0X, 2.0X included[2]
- 0.75X, 1.5X optional[2]
- Integrated field stitching for larger areas[2]
- Part Viewing
- Selectable Monochrome and Color imaging with available fringe-free viewing mode[2]
- Part stage
- Motorized stage travel range: XY 200 mm or 200 x 325 mm; tilt ±4°; encoded 200 x 200 x 100 (XYZ) optional[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration50/60 Hz[2]
- Configuration100/240 Volts[2]
- Input Voltage100 to 240 VAC, 50/60 Hz[2]
- Compressed Air for Table4.1 to 5.5 bar (60 to 80 psi), dry and filtered; 6 mm OD hose input, ¼ in.[2]
- VacuumOptional connection for 6 mm hose[2]
- Compressed air for table4.1 to 5.5 bar (60 to 80 psi), dry and filtered; 6 mm OD hose input, 1/4 in.[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What objective range does the Zygo Nexview NX 2 support?
The Zygo Nexview NX 2 supports objectives from 1.0X to 100X magnification in standard and long working distance versions.[2][3][1]
What are the stage travel options on the Zygo Nexview NX 2?
The Zygo Nexview NX 2 has motorized XY stage travel options of 200 mm or 200 x 325 mm with ±4 tilt. The Zygo Nexview NX 2 also has an optional encoded 200 x 200 x 100 mm XYZ stage.[2][3][1][4]
What vertical scan range does the Zygo Nexview NX 2 provide?
The Zygo Nexview NX 2 provides a vertical scan range of 150 μm with precision piezo drive and 20 mm with extended scan.[2][3][1]
What measurement array options are available on the Zygo Nexview NX 2?
The Zygo Nexview NX 2 provides selectable measurement arrays of 1600 x 1200, 1000 x 1000, 1000 x 600, and 1000 x 200.[2][3][1]
What repeatability and resolution figures are given for surface topography on the Zygo Nexview NX 2?
The Zygo Nexview NX 2 has surface topography repeatability of 0.06 nm and RMS repeatability of 0.005 nm. The Zygo Nexview NX 2 has optical lateral resolution of 0.34 μm with the 100X objective and spatial sampling of 0.04 μm with the 100X objective and 2X zoom.[2][3][1]
Not publicly documented
The following facts about the Nexview NX 2 Optical Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Nexview NX 2 Optical Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Nexview NX 2 Optical Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Nexview NX 2 Optical Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Nexview NX 2 Optical Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Nexview NX 2 Optical Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
- [3]Inventory photo
- [4]Optical Profilers - Nexview™ NX2 - Zygo — store.zygo.comstore.zygo.com
Last updated Oct 21, 2026.
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