EV Group

EVG40 alternatives

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Comparable Metrology & Inspection equipment documented in the Waferpedia catalog.

EV Group EVG40 entry →All Metrology & Inspection tools →

6 comparable tools

KLA
Archer 10 XT Overlay
200mm
Metrology & Inspection
The KLA Archer 10 XT Overlay System is a 200mm overlay metrology system with refurbishment-upgraded components and software version 5.6.
Veeco
Dektak
200mm
Metrology & Inspection
Veeco Dektak 150 is a stylus-based surface profiler used for measuring surface topography and thin film step heights.
KLA
P-15
200mm
Metrology & Inspection
The KLA Tencor P-15 is a profilometer with a 200 mm sample table with vacuum.
KLA
P-2
200mm
Metrology & Inspection
The KLA Tencor P-2 is a profilometer with a 200 mm sample table with vacuum and a 3D scan option.
Filmetrics
R50
200mm
Metrology & Inspection
The Filmetrics R50 – 200 – 4PP is a metrology tool configured by default for metallic layers and sample thicknesses of 525 µm ± 25 µm.
Zeiss
sem2
200mm
Metrology & Inspection
Zeiss 200 mm Scanning Electron Microscope.

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