EV Group
EVG40
Wafer size
200mm
Optics
High power objectives from 5x to 50x[1]
What is it?
What do the numbers mean?
Wafer handling3
- Semi-automated basic unit
- Alignment stage optics; advanced features include image recognition system, quick transparent overlay, and linewidth measurement mode; automation features include programmable microscope stage rack and motorized chuck rotation[1]
- Fully-automated basic unit
- Alignment stage optics; advanced features include image recognition system, quick transparent overlay, and linewidth measurement mode; automation features include programmable microscope stage rack, motorized chuck rotation, and robotic autoload cassette-to-cassette[1]
Optics & imaging3
- Advanced basic unit
- Alignment stage optics; advanced features include image recognition system, quick transparent overlay, and linewidth measurement mode[1]
Performance3
Control & software1
Configuration & options2
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| EVG40 Standard | — | — | Basic unit with alignment stage optics | web.archive.org[1] |
| EVG40 Advanced | — | — | Basic unit with alignment stage optics and advanced features including image recognition system, quick transparent overlay, and linewidth measurement mode | web.archive.org[1] |
| EVG40 Semi-Automated | — | — | Basic unit with alignment stage optics and advanced features including image recognition system, quick transparent overlay, linewidth measurement mode, programmable microscope stage rack, and motorized chuck rotation | web.archive.org[1] |
| EVG40 Fully-Automated | — | — | Basic unit with alignment stage optics and advanced features including image recognition system, quick transparent overlay, linewidth measurement mode, programmable microscope stage rack, motorized chuck rotation, and robotic autoload cassette-to-cassette | web.archive.org[1] |
| EVG40 AUTOMATED | — | — | Mentioned as a field-upgrade target from the semi-automated version | web.archive.org[1] |
| EVG40 Standard Basic Unit | — | — | Alignment Stage Optics | web.archive.org[1] |
| EVG40 Advanced Basic Unit | — | — | Alignment Stage Optics; Advanced Features: Image Recognition System, Quick Transparent Overlay, Linewidth Measurement Mode | web.archive.org[1] |
| EVG40 Semi-Automated Basic Unit | — | — | Alignment Stage Optics; Advanced Features: Image Recognition System, Quick Transparent Overlay, Linewidth Measurement Mode; Automation Features: Programmable Microscope Stage Rack, Motorized Chuck Rotation | web.archive.org[1] |
| EVG40 Fully-Automated Basic Unit | — | — | Alignment Stage Optics; Advanced Features: Image Recognition System, Quick Transparent Overlay, Linewidth Measurement Mode; Automation Features: Programmable Microscope Stage Rack, Motorized Chuck Rotation, Robotic Autoload Cassette-to-Cassette | web.archive.org[1] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the EVG40 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EVG40 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the EVG40 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EVG40 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EVG40 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the EVG40 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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