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Filmetrics

R50

FilmetricsR50
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What is it?

The source identifies the Filmetrics R50 – 200 – 4PP under the Metrology equipment section and states that it is configured by default for metallic layers and for sample thickness of 525 µm ± 25 µm. No additional specifications are provided in the source text.

What can it run?

Process applications and technology nodes documented for this tool.

  • metrology

What do the numbers mean?

Configuration & options4

Default configuration
configured by default for metallic layers[1]
Accurate?
Default sample thickness
525 um +/- 25 um[1]
Accurate?
Equipment section
Metrology[1]
Accurate?
Related equipment on same page group
AIT CMT-SR2000N 4-Point Probe Measurement System; MPI TS150 Probe Station[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the R50 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the R50 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the R50 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the R50 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the R50 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the R50 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.chepfl.ch
  2. [2]AIT CMT-SR2000N 4-Point Probe Measurement System ‒ Center of MicroNanoTechnology CMi ‐ EPFLepfl.chepfl.ch
  3. [3]MPI TS150 Probe Station ‒ Center of MicroNanoTechnology CMi ‐ EPFLepfl.chepfl.ch
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Last updated Jul 29, 2026.

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