Karl Suss
MA6 alternatives
Comparable Lithography equipment documented in the Waferpedia catalog.
6 comparable tools
GCA
6300 DSW
150mm
Lithography
The GCA 6300 DSW is a g-line wafer stepper used for lithography, with source descriptions also identifying related i-line GCA 6300 stepper documentation.
Raith
EBPG5000
150mm
Lithography
SUSS MicroTec
MA6-BA6
150mm
Lithography
The JEOL JBX-6300FS is an advanced direct-write electron beam lithography system for up to 150mm wafers.
Brooks
017-0024-01 Prealigner
Lithography
Brooks
017-0146-01 Prealigner
Lithography
CEE
100
6"
Lithography
The CEE 100 is a lithography spin coater/developer tool that accepts up to 6-inch wafers and supports programmable multi-step processing.
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