Canon FPA 3000

Models in this family

1. 

   FPA 3000 EX 4
2. 

   FPA 3000 EX 5
3. 

   FPA 3000 EX 5 Fine Pattern

   Canon FPA 3000 EX 5 is a fine pattern aligner.

4. 

   FPA 3000 i 4
5. 

   FPA 3000 i 4 Fine Pattern
6. 

   FPA 3000 i 4 i-Line

   Canon FPA 3000 i 4 i-Line Stepper is an 8-inch lithography stepper with i-line designation.

7. 

   FPA 3000 i 5
8. 

   FPA 3000 i 5 + Fine Pattern

   Canon FPA 3000 i 5 + Fine Pattern is a lithography aligner described with a 6-inch wafer size.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Canon FPA 3000 i 5 + Fine Pattern Aligner	—	—	Listed with a plus sign in the model name.	Equipment inventory listing[1]

9. 

   FPA 3000 i 5 ++ i-Line

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 3000 i 5 +	i-line	—	—	Equipment inventory listing[2]

10. 

    FPA 3000 iW

Sources