Canon
FPA 3000 i 5 ++ i-Line
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Canon FPA 3000 i 5 ++ is an i-line stepper designed for 8-inch wafers.[1]
What it is
General reference — not yet source-verifiedA stepper is a projection lithography tool used to transfer patterned features from a reticle onto photoresist on a wafer. Stepper systems expose one field at a time and repeat that field across the wafer through coordinated stage motion and optical imaging.
How it works
General reference — not yet source-verifiedStepper lithography tools project a reticle pattern through reduction optics onto a resist coated wafer. Stepper lithography tools align the wafer to the reticle, expose a single field, and then move the wafer stage to repeat the exposure across the substrate.
Where it fits in the process flow
General reference — not yet source-verifiedStepper lithography tools sit in the photolithography portion of wafer fabrication. Photolithography follows resist coating and bake steps, and photolithography is followed by development and pattern transfer steps such as etch or implant module use, depending on the layer being formed.
Applications
General reference — not yet source-verifiedi-Line steppers are used for patterned exposures on semiconductor and related substrates where repeatable optical imaging is needed. Stepper tools in this class are used for layer definition across process flows that rely on photoresist patterning before subsequent material removal, material addition, or doping steps.
What do the numbers mean?
Wafer handling1
Optics & imaging1
Configuration & options7
- Refurbished to run 150mm Saphhire (2017)[2]
Vintage & configurations
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Nikon NSR SF 155 i-Line— Same function class: Lithography, nullCompare in depthsource[1]
- Nikon SF 130— Same function class: Lithography, nullCompare in depthsource[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of tool is the Canon FPA 3000 i 5 ++?
The Canon FPA 3000 i 5 ++ is an i-Line stepper.[1]
Not publicly documented
The following facts about the FPA 3000 i 5 ++ i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 3000 i 5 ++ i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FPA 3000 i 5 ++ i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FPA 3000 i 5 ++ i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FPA 3000 i 5 ++ i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FPA 3000 i 5 ++ i-Line are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (11)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]Inventory photo
- [7]Inventory photo
- [8]Inventory photo
- [9]Inventory photo
- [10]Equipment inventory listing
- [11]Equipment inventory listing
Last updated Oct 16, 2026.
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The Nikon NSR SF 155 is an i-line stepper with a 12-inch wafer size.
The Nikon SF 130 is a lithography stepper with an i-line 365 nm exposure wavelength and support for 200 mm wafer exposure.
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