Canon

FPA 3000 i 4 i-Line

Lithography Canon FPA 3000 family

Research Quality: 30% complete

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FPA 3000 i 4 i-Line — Inventory photo — Fig. 01FPA 3000 i 4 i-LineInventory photo^[1]

Plate 01Canon FPA3000 I4 Stepper with www.CSISEMI.com
CSI SemiWatch on YouTube

Performance

9087^[1]

Optics

6"^[1]

What is it?

Canon FPA 3000 i 4 i-Line Stepper is an 8-inch lithography stepper with i-line designation.

Why won't it start?

Documented failure modes, common issues, and field considerations.

PCBs from D-Rack missing
Main computer missing

What do the numbers mean?

Wafer handling3

Wafer type: Notch^[1]
Chuck type: Pin^[1]
Cassette barcode: No^[1]

Optics & imaging4

Reticle size: 6"^[1]
Reticle barcode: No^[1]; Lens data:^[1]
Date of lens data: 4/3/2020^[1]

Performance1

IUC Uniformity NA/Sigma mode (54/60): 9087^[1]

Control & software3

Track interface/type: Yes, DNS^[1]
Software version: V4.08B.09^[1]; Main computer^[1]

Configuration & options5

Auto feed: Left hand^[1]
GBR unit: No^[1]; Missing parts:^[1]; PCBs from D-Rack^[1]
IUC Distribution NA/Sigma mode (54/60): 1.753^[1]

Interested in this tool?

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the FPA 3000 i 4 i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 3000 i 4 i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FPA 3000 i 4 i-Line are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FPA 3000 i 4 i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the FPA 3000 i 4 i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FPA 3000 i 4 i-Line are on record.
Answerable by: an OEM parts catalog or a service engineer