SUSS MicroTec MA 8 Mask

Models in this family

1. 

   MA 8 BA 8 Gen 5 S Compact Mask

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   MA 8 / BA 8 Gen 5 S	Gen 5 S	—	—	Equipment inventory listing[1]

2. 

   MA 8 BA 8 Mask

   The SUSS MA 8 / BA 8 Mask Aligner is a backside optical alignment system with manual wafer loading and unloading.

3. 

   MA 8 Gen 3 Mask

   The SUSS MA 8 Gen 3 Mask Aligner is a lithography tool for 8-inch wafers.

4. 

   MA 8 Mask

   The SUSS MicroTec MA 8 Mask is a lithography tool used to transfer patterned mask information onto a light-sensitive surface on a substrate. It belongs to the class of mask-based exposure systems used in microfabrication and precision patterning.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Gen 2	Gen 2	—	Described as a SUSS MA 8 Mask Aligner Gen 2; one source says it includes TSA and BSA.	Equipment inventory listing[2]
   Gen 4	Gen 4	—	Described as a SUSS MA 8 Mask Aligner Gen 4; one source says it is equipped for TSA 2018 Vintage.	Equipment inventory listing[3]
   MA 8 Mask Aligner - Gen 2 - with TSA & BSA	Gen 2	—	Stated as Gen 2 with TSA and BSA.	Equipment inventory listing[2]
   MA 8 Mask Aligner - Gen 4 - Equipped for TSA 2018 Vintage	Gen 4	2018	Stated as Gen 4 and equipped for TSA 2018 vintage.	Equipment inventory listing[3]

Sources