Tokyo Electron Precio

Models in this family

1. 

   Precio

   The Precio series is a fully automatic wafer-probing platform from Tokyo Electron Limited.

2. 

   Precio Automatic Wafer

   The Tokyo Electron Precio Automatic Wafer Prober is a 12-inch automatic wafer prober.

3. Precio Nano
4. 

   Precio Octo

   Tokyo Electron Precio Octo is a prober with source-stated wafer sizes ranging from 4 inch to 8 inch.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Precio Octo, 4-5 inch special configuration	—	—	Special configuration for 4-5 inch wafers.	Equipment inventory listing[1]
   Precio Octo, ambient-hot temperature range configuration	—	—	Configured for 4 to 8 inch wafers with ambient-hot temperature range.	Equipment inventory listing[2]
   Precio Octo, 8-inch gold hot & cold chuck top system	—	—	Includes CPU VIP3A, chiller C255, right side single top loader, and GPIB interface.	Equipment inventory listing[3]
   Precio Octo	—	2011	Special configuration for 4-5 inch wafers.	Equipment inventory listing[1]

5. 

   Precio XL

   Tokyo Electron Precio XL is a prober described with single open with open loader, focus OCR, hot chuck, WAPP, 93K DD interface, Flip SACC, and GPIB.

6. 

   Precio XL Automatic Wafer

Sources