Tokyo Electron

The TELPADS-O function is an automated probe mark inspection system that uses a high-speed engine to inspect all pads and all wafers, produce quantitative quality-control data for probe marks, and reduce operator interaction by eliminating manual microscope inspection.[7]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Precio Octo, 4-5 inch special configuration | — | — | Special configuration for 4-5 inch wafers. | Equipment inventory listing[3] |
| Precio Octo, ambient-hot temperature range configuration | — | — | Configured for 4 to 8 inch wafers with ambient-hot temperature range. | Equipment inventory listing[6] |
| Precio Octo, 8-inch gold hot & cold chuck top system | — | — | Includes CPU VIP3A, chiller C255, right side single top loader, and GPIB interface. | Equipment inventory listing[2] |
| Precio Octo | — | 2011 | Special configuration for 4-5 inch wafers. | Equipment inventory listing[3] |
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
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It makes temporary electrical contact to wafer-level devices or structures so their electrical behavior can be measured before later manufacturing steps.
Such systems are used to evaluate basic electrical properties, continuity, leakage, and other wafer-level characteristics defined by the test program.
It is used in the wafer test stage, after fabrication and before assembly, packaging, or other downstream processing.
Wafer-level probing helps screen devices early, support process control, and reduce the amount of downstream work applied to nonconforming material.
The main mechanism is precise alignment and controlled contact between the probe assembly and wafer contact pads or test structures.
The following facts about the Precio Octo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio Octo are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Precio Octo are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio Octo are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio Octo is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Precio Octo are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Jul 30, 2026.
The KLA 1007 is a wafer prober manufactured by KLA.